Diffraction by photomasks

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https://hdl.handle.net/11299/181204

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Title

Diffraction by photomasks

Authors

Sezginer, Apo

Chen, Weitao

Jorgensen, Jens Christian

Moore, Dennis

Sakovich, Anton

Sardar, Chirin

Tseng, Hsiao-Chieh

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2012-05

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University of Minnesota. Institute for Mathematics and Its Applications

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Preprint

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1 online resource (PDF, 17 pages, includes illustrations)

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IMA Preprint Series;2395

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Sezginer, Apo; Chen, Weitao; Jorgensen, Jens Christian; Moore, Dennis; Sakovich, Anton; Sardar, Chirin; Tseng, Hsiao-Chieh. (2012). Diffraction by photomasks. Retrieved from the University Digital Conservancy, https://hdl.handle.net/11299/181204.

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