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Fast calculation of diffraction by photomasks

Costa, Timothy
Cummings, John
Jenkinson, Michael
Kim, Yeon Eung
Martinez, Jose de Jesus
Olivares, Nicole
Sezginer, Apo
2014-09
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2437.pdf (1.43 MB)

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https://hdl.handle.net/11299/181504
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Fast calculation of diffraction by photomasks

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2014-09

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University of Minnesota. Institute for Mathematics and Its Applications

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Preprint

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1 online resource (PDF, 21 pages, includes illustrations)

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IMA Preprint Series;2437

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Costa, Timothy; Cummings, John; Jenkinson, Michael; Kim, Yeon Eung; Martinez, Jose de Jesus; Olivares, Nicole; Sezginer, Apo. (2014). Fast calculation of diffraction by photomasks. Retrieved from the University Digital Conservancy, https://hdl.handle.net/11299/181504.

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