Browsing by Author "Borucki, Leonard"
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Item An analysis of the chemical-mechanical polishing process(1998-10) Borucki, Leonard; Connell, Cameron; Jadallah, Hala; Li, Jianbo; Park, Peter J.; Petracovici, Boris; Zeigler, DavidItem An Analysis of the Chemical-Mechanical Polishing Process(1998-10) Borucki, Leonard; Connell, Cameron; Jadallah, Hala; Li, Jianbo; Park, Peter J.; Petracovici, Boris; Zeigler, DavidItem A multiscale simulator for low pressure chemical vapor deposition(1997-02) Gobbert, M.K.; Merchant, T.P.; Borucki, Leonard; Cale, T.S.