Sezginer, ApoChen, WeitaoJorgensen, Jens ChristianMoore, DennisSakovich, AntonSardar, ChirinTseng, Hsiao-Chieh2016-06-282016-06-282012-05https://hdl.handle.net/11299/1812041 online resource (PDF, 17 pages, includes illustrations)enDiffraction by photomasksPreprint