Costa, TimothyCummings, JohnJenkinson, MichaelKim, Yeon EungMartinez, Jose de JesusOlivares, NicoleSezginer, Apo2016-07-262016-07-262014-09https://hdl.handle.net/11299/1815041 online resource (PDF, 21 pages, includes illustrations)enFast calculation of diffraction by photomasksPreprint