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Phase transitions curve evolution, and the control of semiconductor manufacturing processes
Berg, Jordan M.; Yezzi, A.; Tannenbaum, Allen (1997)
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https://hdl.handle.net/11299/3034
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Title
Phase transitions curve evolution, and the control of semiconductor manufacturing processes
Authors
Issue Date
1997-02
Appears in collections
IMA Preprints Series [2486]
Identifiers
1454
Related to
Institute for Mathematics and Its Applications>IMA Preprints Series
Suggested Citation
Berg, Jordan M.; Yezzi, A.; Tannenbaum, Allen. (1997). Phase transitions curve evolution, and the control of semiconductor manufacturing processes. Retrieved from the University of Minnesota Digital Conservancy, https://hdl.handle.net/11299/3034.
Content distributed via the University of Minnesota's Digital Conservancy may be subject to additional license and use restrictions applied by the depositor.