Title
Phase transitions curve evolution, and the control of semiconductor manufacturing processes
Related to
Institute for Mathematics and Its Applications>IMA Preprints Series
Suggested Citation
Berg, Jordan M.; Yezzi, A.; Tannenbaum, Allen.
(1997).
Phase transitions curve evolution, and the control of semiconductor manufacturing processes.
Retrieved from the University of Minnesota Digital Conservancy,
https://hdl.handle.net/11299/3034.