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Diffraction by photomasks
Sezginer, Apo; Chen, Weitao; Jorgensen, Jens Christian; Moore, Dennis; Sakovich, Anton; Sardar, Chirin; Tseng, Hsiao-Chieh (University of Minnesota. Institute for Mathematics and Its Applications, 2012)
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https://hdl.handle.net/11299/181204
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Title
Diffraction by photomasks
Authors
Issue Date
2012-05
Publisher
University of Minnesota. Institute for Mathematics and Its Applications
Type
Preprint
Appears in collections
IMA Preprints Series [2486]
Series/Report Number
IMA Preprint Series; 2395
Description
1 online resource (PDF, 17 pages, includes illustrations)
Suggested Citation
Sezginer, Apo; Chen, Weitao; Jorgensen, Jens Christian; Moore, Dennis; Sakovich, Anton; Sardar, Chirin; Tseng, Hsiao-Chieh. (2012). Diffraction by photomasks. University of Minnesota. Institute for Mathematics and Its Applications. Retrieved from the University of Minnesota Digital Conservancy, https://hdl.handle.net/11299/181204.
Content distributed via the University of Minnesota's Digital Conservancy may be subject to additional license and use restrictions applied by the depositor.