Title
Diffraction by photomasks
Publisher
University of Minnesota. Institute for Mathematics and Its Applications
Series/Report Number
IMA Preprint Series;
2395
Description
1 online resource (PDF, 17 pages, includes illustrations)
Suggested Citation
Sezginer, Apo; Chen, Weitao; Jorgensen, Jens Christian; Moore, Dennis; Sakovich, Anton; Sardar, Chirin; Tseng, Hsiao-Chieh.
(2012).
Diffraction by photomasks.
University of Minnesota. Institute for Mathematics and Its Applications.
Retrieved from the University of Minnesota Digital Conservancy,
http://hdl.handle.net/11299/181204.